axial stages on the suction side, the radial flow stages (from the periphery
to the center) on the pressure side (2); the flow channel combining axial
stages (suction) and molecular stages (pressure) (3).
After comparing the computational data, it becomes apparent that the
hybrid flow channel arrangements provide sufficient advantage according
to different optimality criteria. Thus, the flow channel volume decreased
1.3 to 1.8 times depending on both the agility and type of the gas being
pumped, while the flow channel mass decreased 1.7 to 2 times.
The gains in the flow channel volume was in most cases higher for the
arrangement of axial and drum stages (variant 2). When the flow channel
mass was selected as the optimality criterion, the arrangement of axial
and molecular stages (variant 3) appeared more preferable, especially with
hydrogen as actuation gas.
Thus, the usage of the original software for designing the state-of-art
TMPs increases their efficiency by optimization of their main characteristics
and parameters. Another perspective trend for TMP improvement is
creating and applying new design arrangements of the flow channel
accounting for the operational conditions and feasibility of the appropriate
manufacturing technology. Potentially, the fundamentals of full structural
optimization can be formalized for the modern TMP design process.
REFERENCES
[1] Hoffman D.M., Singh B., John H. Thomas III, eds. Handbook of Vacuum Science and
Technology Academic Press, 1997 . 835 p. (Russ. Ed.: Khoffman D. (red.), Singkh B.
(red.), Dzh. Tomas III (red.) Spravochnik po vakuumnoy tekhnike i tekhnologiyam.
Moscow, Tekhnosfera Publ., 2011. 736 p.).
[2] Demihov K.E., Panfilov Yu.V., Nikulin N.K. Avtonomova I.V., Aleksandrova А.Т.,
Androsov A.V., Burmistrov V.A., Bykov D.V., Deulin E.A., Ivanovskij G.F.,
Isaev A.V., Kalinkin D.A., Kapustin E.N., Kemenov V.N., Kuprijanov V.I., eds.
Vakuumnaja tehnika: Spravochnik [Handbook of vacuum technology]. 3rd Ed.
Moscow, Mashinostroenie Publ., 2009. 590 p.
[3] Demikhov K.E., Nikulin N.K. Optimizatsiya vysokovakuumnykh mekhanicheskikh
nasosov [Optimization of high-vacuum mechanical pumps]. Moscow, MGTU
im. N.E. Baumana Publ., 2010. 255 p.
[4] Product Leitfaden [Product Guide]. Alcatel Hochvakuumtechnik GmbH, Annecy,
1995.
[5] Komponenten f¨ur die Vakuumtechnik [Components for vacuum technology]. Balzers-
Pfeiffer GmbH, Balzers, 1996.
[6] Vakuum katalog [Vacuum catalog]. Edwards Hochvakuum GmbH, Marburg, 1993.
[7] Katalog HV 300, Teil B [Catalog HV 300, Part B]. Leybold AG, Cologne, 1994.
[8] Vacuum products catalog. Varian Ass. Inc., Lexington, 1995–1998.
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