POWER AND TRANSPORT ENGINEERING
CURRENT TRENDS OF HIGH-VACUUM PUMPS
K.E. Demikhov
Bauman Moscow State Technical University, Moscow, Russian Federation
e-mail:
ked@bmstu.ruTurbomolecular vacuum pumps are widely used in various fields of science and
technology, which continually stimulates the interest in creating new kinds of pumps.
The theory of operating process in the flow channel of turbomolecular vacuum pumps
under various operating conditions is developed; one of its key features is a fairly
accurate estimation of their main parameters and characteristics, thereby various
influencing factors can be analyzed. Thus, the flow channel of a single high-vacuum
pump could be optimized by various optimization criteria. An extensive database is
accumulated enabling scientists to develop efficient turbomolecular vacuum pumps
with various initial parameters. Consequently, a relevant issue today is the search
for perspectives for turbomolecular vacuum pumps further development. The paper
considers current trends in designing the improvement of turbomolecular vacuum
pumps with hybrid flow channels. Advantages of certain designs are specified. The
guidelines for their applications are given. The results of the comparative analysis
are presented, which show an application efficiency of various flow channel design
arrangements.
Keywords
:
flow channel, rotor wheel, agility, pumping parameters, ultimate vacuum.
From the moment of their appearance (1960-s), vacuum turbomolecular
pumps (TMP) have occupied an important position among other high-
vacuum pumping devices. Due to a number of their significant advantages,
TMP posed a serious threat to the recognized leaders in vacuum pumping
systems, such as oil-vapour vacuum pumps, which cannot be referred to
as oil-free pumping systems (not “polluting” the volume with organic
compounds). All of these make TMP the focus of attention for researchers
from different countries. This resulted in a number of research papers
devoted to the processes occuring in the TMP flow channel [1, 2].
At present, it can be justifiably stated that TMP are ones of few
high-vacuum pumps that have adequate theoretical scientific support for
developing state-of-art pumps without any subsequent experimental testing
and refinement.
BMSTU researchers have made a significant contribution to this field,
which leads to software for upgrading the flow channel of high-vacuum
mechanical pumps (HVMP) [3]. It founded the basis for the first of its kind
HVMP CAD system created in close cooperation with the Special Design
and Engineering Bureau
Vector
. No analogous system has appeared in the
field of vacuum engineering until now.
The system being put into operation in 1985 allowed developing
and launching the manufacturing production of a whole range of the
ISSN 0236-3941. HERALD of the BMSTU. Series Mechanical Engineering. 2014. No. 5
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