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Prospects for Developing Modern High-Vacuum Mechanical Pumps
| Authors: Ochkov A.A. | Published: 04.04.2022 |
| Published in issue: #1(140)/2022 | |
| DOI: | |
| Category: Mechanical Engineering and Machine Science | Chapter: Hydraulic Machines, Vacuum, Compressor Technology, Hydraulic and Pneumatic Systems | |
| Keywords: high vacuum mechanical pumps, turbomolecular vacuum pumps, molecular vacuum pumps, optimization, pumping characteristics | |