Prospects for Developing Modern High-Vacuum Mechanical Pumps

Abstract

High-vacuum mechanical pumps are widely used in various fields of science and technology for research and industrial applications. Modern high-vacuum mechanical pumps include molecular vacuum pumps, turbomolecular vacuum pumps and hybrid turbomolecular vacuum pumps, i.e., designs that represent a turbomolecular vacuum pump with one or more additional molecular stages. There are also a number of experimental and theoretical developments that propose combinations of different types of high-vacuum pumps in which, as a rule, on the suction side the main pumping is carried out by an axial turbomolecular stage. These schemes belong to the class of modern high-vacuum mechanical pumps. The paper examines the designs and analyzes scientific studies of modern high-vacuum mechanical pumps. Relying on this overview, we found the unsolved problems of designing and mathematical modeling of high-vacuum mechanical pumps working processes, which could give further prospects for vacuum technology development

The study was carried out with the financial support of the RFBR (project no. 20-18-50177)

Please cite this article in English as:

Ochkov A.A. Prospects for developing modern high-vacuum mechanical pumps. Herald of the Bauman Moscow State Technical University, Series Mechanical Engineering, 2022, no. 1 (140), pp. 103--137 (in Russ.). DOI: https://doi.org/10.18698/0236-3941-2022-1-103-137

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