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On the Method of Calculating Diffusion Vacuum Pump Stage Pumping Parameters
| Authors: Demikhov K.E., Ochkov A.A. | Published: 26.06.2021 |
| Published in issue: #2(137)/2021 | |
| DOI: | |
| Category: Power Engineering | Chapter: Vacuum, Compressor Technology, and Pneumatic Systems | |
| Keywords: limit residual pressure, pumping speed, flow of gas molecules, energy exchange between gas and steam molecules | |