On the Method of Calculating Diffusion Vacuum Pump Stage Pumping Parameters

Authors: Demikhov K.E., Ochkov A.A. Published: 26.06.2021
Published in issue: #2(137)/2021  

DOI: 10.18698/0236-3941-2021-2-85-93

Category: Power Engineering | Chapter: Vacuum, Compressor Technology, and Pneumatic Systems  
Keywords: limit residual pressure, pumping speed, flow of gas molecules, energy exchange between gas and steam molecules

At present, steam jet vacuum pumps are widely used in various fields of science and technology due to a number of advantages, e.g., reliability, relative simplicity of design, and manufacturability, over other pumping means. The paper analyzes the existing mathematical models of working processes, methods for calculating the pumping parameters of steam-jet vacuum pumps. The problem of improving these methods, which are used in the design, is still urgent. The study attempts to further develop the models in order to increase their practical significance for the pumps design: in particular, the processes of pumping by the first stages of a diffusion pump are considered, since it is they that determine the efficiency of the pump as a whole. Analytical dependences for calculating the main pumping parameters of widely used diffusion vacuum pumps are presented. The obtained equations are a certain clarifying correction of the known provisions on this topic. Findings of research are of practical importance for the design of modern steam-jet vacuum pumps


[1] Hoffman D.M., Singh B., Thomas J.H., eds. Handbook of vacuum science and technology. Academic Press, 1997.

[2] Demikhov K.E., ed. Vakuumnaya tekhnika [Vacuum equipment]. Moscow, Mashinostroenie Publ., 2009.

[3] Tseytlin A.B. Parostruynye vakuumnye nasosy [Steam-ejecting vacuum pumps]. Moscow, Leningrad, Energiya Publ., 1965.

[4] Power B.D. High vacuum pumping equipment. London, Chapman and Hall, 1966.

[5] Gaede W. Die Molekularluftpumpe. Ann. Phys., 1913, vol. 346, no. 7, pp. 337--380. DOI: https://doi.org/10.1002/andp.19133460707

[6] Jaeckel R. Kleinste Drucke ihre Messung und Erzeugung. Berlin, Gottingen, Heidelberg, Springer-Verlag, 1950.

[7] Kikoin A.K., Kikoin I.K. Molekulyarnaya fizika [Molecular physics]. Moscow, Nauka Publ., 1976.

[8] Skobelkin V.I., Yushchenkova N.I. Theory of steam jet vacuum pump. ZhTR, 1954, vol. 24, no. 10, pp. 1879--1892 (in Russ.).

[9] Putilovskiy F.D., Gumerov N.M., Khisameev I.G., et al. K raschetu diffuzionnykh nasosov [To the calculation of diffusion pumps]. V: Fizika i tekhnika vakuuma [In: Vacuum physics and technique]. Kazan, Kazanskii Univ. Publ., 1974, pp. 89--101 (in Russ.).

[10] Vacuum technology book. Vol. 2. Pfeiffer Vacuum, 2013. pfeiffer-vacuum.com: website. Available at: https://www.pfeiffer-vacuum.com/en/know-how (accessed: 20.05.2020).

[11] Hybrid turbomolecular pumps. Adixen Alcatel, 2013.

[12] Giors S., Colombo E., Inzoli F., et al. Computational fluid dynamic model of a tapered Holweck vacuum pump operating in the viscous and transition regimes. I. Vacuum performance. J. Vac. Sc. Technol. A, 2006, vol. 24, no. 4, pp. 1584--1591. DOI: https://doi.org/10.1116/1.2178362

[13] Umrath D.W., ed. Fundamentals of vacuum technology. Leybold, 2007.

[14] Pfeiffer Vacuum Catalogs, 2013. directindustry.com.ru: website.Available at: https://www.directindustry.com.ru/prod/pfeiffer-vacuum-14656.html (accessed: 20.05.2020).

[15] Agilent Turbo-V Pumps. 2013. agilent.com: website. Available at: https://www.agilent.com/cs/library/catalogs/public/07_turbo_pums (accessed: 20.05.2020).