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Technology of Magnetron Deposition of Nanosized High-Barrier Relative Oxygen Aluminium Oxide Coating on Roll Pet Film
| Authors: Panchenko V.P., Dyachkov A.L., Korolev S.P, Kravchuk K.S., Sadogursky M.N., Seidman L.A. | Published: 30.04.2020 |
| Published in issue: #2(131)/2020 | |
| DOI: | |
| Category: Mechanical Engineering and Machine Science | Chapter: Technology and Equipment of Mechanical and Physical Processing | |
| Keywords: magnetron deposition, aluminum oxide, nanosized layer, PET film, facility, mode of operation, technology, permeability, AFM-image | |