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Specifics of Selecting a Backing Pump for a Turbomolecular Vacuum Pump Providing Neccessary Pumping Parameters
| Authors: Demikhov K.E., Ochkov A.A. | Published: 06.12.2016 |
| Published in issue: #6(111)/2016 | |
| DOI: | |
| Category: Power Engineering | Chapter: Vacuum, Compressor Technology, and Pneumatic Systems | |
| Keywords: fast action, suction pressure, pumping performance, flowing part | |