Specifics of Selecting a Backing Pump for a Turbomolecular Vacuum Pump Providing Neccessary Pumping Parameters

Authors: Demikhov K.E., Ochkov A.A. Published: 06.12.2016
Published in issue: #6(111)/2016  

DOI: 10.18698/0236-3941-2016-6-89-95

Category: Power Engineering | Chapter: Vacuum, Compressor Technology, and Pneumatic Systems  
Keywords: fast action, suction pressure, pumping performance, flowing part

The paper describes the results of investigating the influence of the backing pump parameters on the pumping parameters of the turbo vacuum pump. On the basis of the calculation program developed, we for the first time obtained the data on the mutual influence of their pumping performance. These data allowed us to select specific types of pumps while ensuring optimal parameters throughout the pumping system. We also give some recommendations on determining the ratio between the maximum values of the fast action of the backing and turbomolecular vacuum pumps.


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