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Effective Range of Gas Pressure at the Suction Side of the Turbomolecular Vacuum Pump
| Authors: Demikhov K.E., Ochkov A.A. | Published: 19.10.2016 |
| Published in issue: #5(110)/2016 | |
| DOI: | |
| Category: Power Engineering | Chapter: Vacuum, Compressor Technology, and Pneumatic Systems | |
| Keywords: turbomolecular vacuum pump, pump parameter, gas pressure, suction side of the pump | |