Effective Range of Gas Pressure at the Suction Side of the Turbomolecular Vacuum Pump

The choice of a vacuum pump type is crucial for the right gas parameters at the suction side such as, for example, gas pressure range. Currently the most widespread pumps are turbo-molecular vacuum ones. They have salient advantages in efficiency over the competition at a certain gas pressure range. Based on the calculation method designed at Bauman Moscow State Technical University we conducted the research of gas pressure range estimation at the suction side of the pump. This paper offers recommendations as to how to choose the working range of gas pressure for turbomolecular vacuum pumps.

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