Design of Turbo-Molecular High Vacuum Pumps
| Authors: Demikhov K.E., Nikulin N.K. | Published: 03.09.2014 |
| Published in issue: #3(44)/2001 | |
| Category: Design | |
| Keywords: | |
Approaches to improvement of turbo-molecular high vacuum pumps are considered. Design methods are given for combined turbo-molecular high vacuum pumps and also for the flow section of oil-free molecular viscosity vacuum pumps. Results of a flow section design for molecular viscosity flows are presented in comparison with those for the analogous vortex vacuum pump.
