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Efficiency of Using Different Designs of Working Wheels in the Flow Path of a Turbomolecular Vacuum Pump
| Authors: Demikhov K.E. | Published: 20.11.2013 |
| Published in issue: #4(93)/2013 | |
| DOI: | |
| Category: Power-generating and Transport Machine Building | |
| Keywords: working wheel, flow path, blade and disc wheels, exhaust parameters, operation rate | |