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Universal Mathematical Model of De-Gassing Process by Molecular Vacuum Pump
| Authors: Demikhov K.E., Ochkov A.A. | Published: 05.12.2017 |
| Published in issue: #6(117)/2017 | |
| DOI: | |
| Category: Power Engineering | Chapter: Vacuum, Compressor Technology, and Pneumatic Systems | |
| Keywords: mathematical model, vacuum pump, molecular vacuum pump, optimization, pumping speed, flow part | |