Calculation of Parameters of Gas Flow in Thin Channels with Movable Wall

Authors: Demikhov K.E., Nikulin N.K., Svichkar Ye.V. Published: 03.02.2014
Published in issue: #4(77)/2009  


Category: Simulation of Processes  
Keywords: calculation, characteristic, method, vacuum, pump, viscosity, molecule, flow, mode, pressure

A mathematical model of the gas flow in a thin channel with a movable wall considering the viscosity mode of the gas flow is described. Based on the theoretical model, the influence of the geometrical and dynamical channel parameters on the pumping-out characteristic of the vacuum pump is studied. An impact of the channel surface on the gas flow is taken into account with a coefficient of the external friction.