Current trends of high-vacuum pumps

Turbomolecular vacuum pumps are widely used in various fields of science and technology, which continually stimulates the interest in creating new kinds of pumps. The theory of operating process in the flow channel of turbomolecular vacuum pumps under various operating conditions is developed; one of its key features is a fairly accurate estimation of their main parameters and characteristics, thereby various influencing factors can be analyzed. Thus, the flow channel of a single high-vacuum pump could be optimized by various optimization criteria. An extensive database is accumulated enabling scientists to develop efficient turbomolecular vacuum pumps with various initial parameters. Consequently, a relevant issue today is the search for perspectives for turbomolecular vacuum pumps further development. The paper considers current trends in designing the improvement of turbomolecular vacuum pumps with hybrid flow channels. Advantages of certain designs are specified. The guidelines for their applications are given. The results of the comparative analysis are presented, which show an application efficiency of various flow channel design arrangements.

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