A Technique for Computing Optimum Parameters of a Combined Molecular Drag Vacuum Pump

Creating new designs of high-vacuum pumping equipment and refining existing ones form one of the top priority directions in vacuum technology development. Since the need to increase equipment mobility is growing, the issue of decreasing equipment mass and dimensions is pressing. We developed a method for computing parameters of a new molecular drag vacuum pump design that makes it possible to determine optimum blading section parameters ensuring a given volume flow rate for a wide range of low-side pressures. We provide a comparative analysis of the pump characteristics we computed and characteristics computed

References

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